Elementary Surface Steps In The Dry Chemical Processing Of Semiconductor Materials

Wee A, Murrell AJ, Price RJ, Jackman RB, Foord JS

18 May 1989

Journal article

Journal:

Proceedings of SPIE--the International Society for Optical Engineering

Volume:

1033

SPIE, the international society for optics and photonics

pp.

356 - 371

No abstract available

Keywords:

40 Engineering

4006 Communications Engineering

4009 Electronics, Sensors and Digital Hardware

51 Physical Sciences

5102 Atomic, Molecular and Optical Physics

DOI